Landfills and their methods of operation are disclosed. The errors that are not filtered are triaged by categorizing the error and in response to the categorized error either resolving the error by executing code to proactively test the error and repair it; or collect the data necessary to perform deeper analysis by the customer service center and forwarding the collected data to the customer service center. The asher is used to form the dopant species on the substrate, and the dopant species is driven into the substrate. Respective tag memory is allocated to track the initiation of parameter evaluation and the completion of parameter evaluation for each of the plurality of pixels.