A semiconductor device is made by forming a first conductive layer over a temporary carrier. This trowel will be a big help in many variety of fields that has to deal with different degrees of concave surfaces. An inner wheel is fixed nonrotatably on the frame at the inner axis, and an outer wheel is fixed nonrotatably on the inner end of the outer arm at the outer axis. The thin film stack is on a substrate and defines the bottom of the firing chamber.