Processing methods and internal reactor parts avoid peeling and particle generation caused by differences in the coefficients of thermal expansion between reactor parts and films deposited on the reactor parts in hot wall CVD chambers. The waveguide has the form of a bifilar, non-crossing spiral. The visual indicator is operable to selectively display one or more colors in response to calls received by the healthcare communication system. The communication system is preferably designed as a FlexRay communication system, the spread data being transmittable in chronological synchronization in a time slot of the communication cycle by various subscribers of the system.