A method of forming conductive pillars on a semiconductor wafer in which the conductive pillars are plated with a protecting coating of Ni, Co, Cr, Rh, NiP, NiB, CoWP, or CoP. A lithium battery may utilize the organic electrolytic solution. In one implementation, the process is carried out to form GST films doped with carbon and nitrogen, to impart beneficial film growth and performance properties to the film. The cooling means is controlled to make the temperature in the connection line adjacent to the supply port of the second reactor lower than the temperature in the first reactor.