An immersion lithographic apparatus is disclosed having comprising a pump and buffer volume configured to remove remaining liquid from a substrate, the pump and the buffer volume configured to generate a vacuum cleaning gas flow near the substrate by gas suction into the buffer volume. The tool creates a graphical user interface for the user to select Servers or Suppliers to evaluate. The shock absorbing element includes an elastic member, which has a first elasticity modulus, and which is provided between the bottom surface of the support element and the connection member. After generating the subpixel data values, the computer program maps the subpixel data values to new subpixel data values. 5 radicals of the formula per Si-bonded aminoalkyl group or amino-mono- or -oligo–alkyl group, andpresent amino groups are, if appropriate, acylated andor alkylated andor benzylated andor protonated at least partially to give amide groups, are described.