Pressure sensors having a topside boss and a cavity formed using deep reactive-ion etching or plasma etching. R11\u2014CHF\u2014CF2\u2014SO3\u2212\u2003\u2003Formula IR12\u2014CF2\u2014CF2\u2014SO3\u2212\u2003\u2003Formula II2N\u2212\u2003\u2003Formula III. The electrodes are each manipulated by an operating device that is controlled by a control unit included in the ignition system of the engine. Lithography and sputtering can be employed to pattern a gold layer, while screen printing can be employed to similarly pattern graphite.