The image of a pattern of reticle 12 is, being illuminated with exposure light IL of vacuum ultraviolet range, projected, via projection optical system PL, onto wafer 17a on wafer stage 18a in wafer chamber 24. The decorative fabric replaces the heavy fan blade while still providing its function of air circulation. The use of this type of polymeric binder reduces residue in the developer as elements are processed. The set of peripheral knowledge article results is generated by searching knowledge article resources for background information on the primary search terms or the secondary search terms. In addition, the lightweight native method invocation can include macro instructions that operate efficiently to convert the Java parameters into native parameters. The resulting composition can then be used in a process for oxidizing carbon monoxide with free oxygen.