A laser marking apparatus and method having an energy source which is not substantially transmissible through the substrate of a semiconductor chip, or the substrate of the semiconductor chip is substantially opaque to the energy source for marking the surface of a semiconductor chip, are described herein. The surveillance system includes a control tower configured to be coupled with and separated from a flying vehicle, and receive an image captured by the flying vehicle through a first communication network, wherein the control tower is further configured to transmit the received image to a central control station through a second communication network for analysis of the received image. The rim has an open diameter of at least twenty centimeters and no more than twenty eight centimeters. A digitizer is also provided for receiving the analog signal from the telephone. A body implant mask for implanting dopants for the transistor body is also used as an etch mask for forming the vertically oriented gate trenches in the dielectric liners.