A grit extractor includes inlet and outlet flumes arranged to inject and extract liquid tangentially into a round chamber. The chamber assembly provides a controlled atmospheric condition therein to isolate semiconductor substrates, a wafer stage device, and the process of making semiconductor substrates from the atmospheric condition so that the resulted substrates have an improved quality and meet certain wafer manufacturing specifications. The housing assembly also includes a noise reduction assembly that includes a tortuous passageway through which air passing through the inlet andor outlet passes.