An electrostatic clamp for use in a lithographic apparatus includes a layer of material provided with burls, wherein an electrode surrounded by an insulator and or a dielectric material is provided in between the burls. This method first locates a target object within a search window in a selected image. When another prefetch is requested, if the first count is greater than the smaller of the N second counts, the candidate prefetched cache line is retired into the cache; otherwise the prefetched cache line is discarded. The nanojunctions formed at the intersection of the crossing wires defines a vertical tunneling diode that rectifies the AC signal from a coupled antenna and generates a DC signal suitable for reforming a video image. The latching flange forms at least one resisting surface.