A method of forming a device is disclosed. The tri-layered anti-reflective coating is used to minimize pattern distortion due to reflections from neighboring features in the construction of microcircuits. The hyper defibrillated fiber slurry produced can be defined as one reaching a Schopper-Riegler level between 75 SR and 85 SR andor producing a pressed, dried board with a density of preferably at least 850 kgm3. During the imaging simulation of the mask image, a mask bias is employed in order to compensate for three-dimensional mask effects. The actuator includes a heating portion that is capable of being heated on receipt of the electrical signal to expand.