There is provided a method of fabricating a split-gate flash memory cell using a spacer oxidation process. Said injection means are formed in the manifold in such a way that the recirculated exhaust gas flow is injected in a counter-flow to the admission gas flow. When the first member and the second member are combined, the first member and the second member form a big tape dispenser to mount a big tape roll on the second tape roll mount and cut a tape of the big tape roll by the cutter. The liquid storage chambers have concavities in the bottom walls thereof. Thus, the laser beam heading toward the substrate is accurately detected, and the gain of the laser beam is effectively controlled. The method compensates for abrupt changes in the operation of the plant by resetting the extremum seeking control strategy in response to a detection of the abrupt change.