1459997453-35be5f8a-90d4-42bb-bf70-1fc70f724d3d

Methods, systems and apparatus for using nanoparticle seeded short-wavelength discharge generator sources discharge sources, for use with X-ray, XUV and EUV light emissions. Two or more impact drivers for delivering blows to the element are mounted on or operatively connected to the element. When the second measurement circuit is selected through the switch unit, the second measurement circuit outputs a frequency scanning signal to scan the quartz sensing component, so as to output an impedance sensing signal. A race retention sleeve is provided which engages the second portion of the first race and the second portion of the second race. The enhanced electrical properties are obtained by providing a thin bondline of conductive adhesive that is essentially void free.