A physical quantity sensor includes a substrate, an oscillating member that is disposed over the substrate, support portions that support the oscillating member and that are disposed along a first axis, and detection electrodes that are disposed on the substrate so as to oppose the oscillating member. The device includes a radio that enables bidirectional data communication between the device and the at least one wireless access point, the radio being able to operate in a power save mode and an active transmission mode. Methods of making Apo-2LTRAIL formulations, as well as devices and kits containing such formulations are also provided. The system and method can further comprise a feed-forward control loop to deal with conditions at start-up and when external disturbances are applied to the ORC power plant. Further, when the vibrator is formed by monocrystalline silicon and the processing of the beam shape is performed by the anisotropic etching, the fine resonator which has a high Q value and has excellent surface property can be generated. Torque limitation is performed such that the motor torque command value does not exceed the maximum acceptable torque Tmax.