Processes, software and systems asymmetrically shrink a layout for a VLSI circuit design. 01 to 5 weight percent of an antioxidant, mold release agent, colorant, stabilizer, or a combination thereof;wherein an article having a 2 mm thickness and molded from the composition has a near infrared transmission at 960 nanometers of greater than 30 percent and a Vicat softening temperature of at least 170\xb0 C. If two or more fluoride crystal lenses are used, they should have lens axes oriented in the -, -, or -direction of the crystallographic structure, and they should be oriented at rotated positions relative to each other. The methods provide a hybrid substrate in which at least one of the device layers includes strained Si.