A low-voltage detection reset circuit that suppresses a current consumption in a stand-by mode and is reduced in a size is offered. One of the regions includes transistors having a nanocluster layer and another of the regions includes transistors with a thin gate oxide used for logic functions. The heat recovery steam generator is provided with a blocking prevention function to prevent blocking of the main stream side steam piping and the bypass side steam piping and a thermal stress generation protection function. The fastening portion may receive a plurality of hitches thereon. The method further includes a step d) of calculating a film thickness at the plurality of points applying the optimal-wavelength reflection intensities at the plurality of points over the top surface of the substrate.