A process for producing a multiplicity of microfluidic arrangements from a plate-shaped composite structure and an atomiser which is provided with such nozzle arrangements is proposed. In at least one embodiment, the semiconductor material includes a dopant in a dopant concentration and defect sites produced in a process-dictated manner in such a way that the semiconductor material includes an ohmic resistivity in a range of between 5\xb7107 \u03a9\xb7cm and 2\xb7109 \u03a9\xb7cm. The retractor is comprised of a locking arrangement allowing a retractor spreader arm to be secured at any longitudinal position along the rack bar, independently of the pinion’s position.