A motor includes a bearing holder and an attachment plate fixed to a radial outer surface of the bearing holder. , which is improved to obtain a high heat efficiency by making disk blades and nozzles arranged in first to final stages from optimum materials and optimally cooling these disk blades and nozzles, and to obtain a combined power generation system using the gas turbine. Next, a PMOS transistor, an NMOS transistor, a multilayer wiring structure, a spiral inductor and a pad are formed, respectively.