1460299542-fd43b244-a7c9-449b-8dae-65ad0f19b773

In one embodiment, a wafer-handling robot in a wafer processing system is automatically calibrated by determining an orientation of the robot relative to a chassis of the wafer processing system, determining hand-off coordinates of a load port in the wafer processing system, and determining hand-off coordinates of a load lock in the wafer processing system. The additional modules are connected with other modules through hermetic connectors. When there is a packet that belongs to the same flow, the cache portion transfers a parameter to the pipeline processing portion assuming a virtual packet in which relevant packets are all connected.