There is proposed an apparatus for doping a material to be doped by generating plasma and accelerating it by a high voltage to form an ion current is proposed, which is particularly suitable for processing a substrate having a large area. A pair of tracks is mounted on the pick-up bed. The redundancy controller is also capable of causing one of the other base stations to use a predetermined amount of its total communication capacity to communicate with mobile stations in a coverage area of the failed base station. The advertising may be either only one-way from the business or may be interactive between the business and a prospective customer. is satisfied, and a top plate having higher thermal conductivity than the cover plate is provided on the cover plate. The points of the contents of the non-allocated material are also placed in the newspaper.