An actuator includes a first piston and a second piston. The second optical element is disposed in an optical path between the first optical element and the wavelength conversion element. The method includes first step of mixing an alloy consisting of elements A and B and Mg metal andor a Mg-containing alloy having a melting point not higher than the melting point of Mg metal, and second step of heat-treating a mixture obtained from first step for 0. The partial not reset of the trace collection hardware occurs only upon a data processor reset signal owned by the debugger.