1460324709-eccee242-9eb3-40e1-b065-86f4f2895ded

The present invention provides a method, system, and computer program product that enables software objects and applications to dynamically self-propagate, as needed, through a computer network. The inspection block has an inspection unit for making a predetermined inspection and a transport robot for transferring a substrate to and from the inspection unit. A driving signal is generated, and the driving signal has a pulse width based on the dimming level and a variable frequency in accordance with a processing mode of the image signal.