A head for dispensing a thin film over a substrate is disclosed. The light transmissionreflection component includes a light entrance section, a light transmissionreflection section, and a light emission section. The local sense amplifier interfaces with at least the decoder and cell array, and is adapted to precharge and equalize at least one line coupled thereto. The raw meal consists mainly of limestone and the calcined material is mainly lime. In the method for forming a capacitor in a semiconductor device, peeling of the lower electrode is prevented, and the etch residues which have been formed when carrying out a dry etching can be effectively removed.