Backbone-substituted 1,4,7,10-tetraaza cyclododecane-N,N\u2032,N\u2033,N\u2032\u2033-tetraacetic acid compounds, metal complexes thereof, compositions thereof, conjugates thereof, and methods of use in diagnostic imaging and treatment of a cellular disorder. The compound can be prepared by reduction of substituted \u03b2-keto ester and can be used as an intermediate in preparing \u03b2-lactam group antibiotics. Each recess has a first side, having a first profile, adjacent to the channel region and a second side, having a second profile, adjacent to a trench isolation region.