First and second ridge type photonic waveguides are provided. With this arrangement, a defect level at an interface between the channel layer and the gate insulating layer is reduced, thereby obtaining performance equivalent to that of a semiconductor apparatus in which all the layered films are crystalline. In one aspect, a biasing means biases the drive wheel away from the deck. The heated liquid and vapor water is heated in heat exchangers decoupled from the steam drum. Retracting the needle within the safety enclosure to a point wherein the sharp tip of the needle is beyond the needle protection section of the flexible member causes the protection section to travel transversely to the direction of motion of the needle.