An immersion exposure apparatus includes an optical member, a supply outlet that supplies a liquid to a space between an upper surface of the optical member and a movable object, and an annular member at least a portion of which is arranged around the optical member, the space between the upper surface of the optical member and the object being filled with the liquid. The analysis assembly is configured to automatically sample slurry pumped into the bowl and automatically transmit data, characterizing the slurry, to the computer. The concave is movable in directions toward or away from the rotating member. This functions to inhibit torque transmission from the closure to the inner seal or reseal structure and further inhibits imperfections in the container rim from scraping or otherwise damaging the inner seal. The FET controller may be configured for supplying the current to the first region of the surface mount connector to produce at least one continuous heat signature characteristic of an improperly connected ground pin. The method includes the steps of providing a waveform shaper for waveform shaping input signal light and outputting output signal light, measuring the quality of the output signal light, and controlling the power of the input signal light so that the quality measured is improved.