This invention is directed to a sterilization method of contaminated areas with biological agents by making use of the acidic ozone water that very effectively kills spores of Bacillus atrophaeus, thereby demonstrating the capability of sterilizing a large surface-area in a very short time and reinstating the contaminated environment as free from toxic biological agents. The system includes a vacuum vessel that has an interior and is configured to support the substrate therein, and at least one nozzle for forming and emitting a gas cluster beam. The second lead frame is laminated on the first lead frame and includes a plurality of wirings for mounting light emitting elements.