A tray for a dry etching apparatus includes substrate accommodation holes penetrating a thickness direction and a substrate support portion supporting an outer peripheral edge portion of a lower surface of a substrate. The destination location may be generated by a third party at a remote computer or wireless device. A mouse connection switch distributes the input operation information of mouse over the plurality of computers in accordance with an instruction of the switching control device. At least one pivotable pendulum weight is provided for avoiding an unintended firing of a shot.