A semiconductor integrated circuit device includes an element isolation region which is formed in a semiconductor substrate to isolate an element region of the semiconductor substrate, memory cells having floating gates and formed on the element region, and resistor elements formed on the element region. The channel region includes a portion doped with an impurity to change the fixed charge density within the portion relative to a remainder of the channel region. The resulting PVE fluids exhibit excellent lubricant properties, similar to poly-alpha olefins, but the PVE fluids have the benefit of higher polarity than PAOs and thus have better solubility and dispersity of polar additives.