A three dimensional device stack structure comprises two or more active device and interconnect layers further connected together using through substrate vias. A traffic processing method supports an MBS in a broadband wireless access communication system having a number of base stations and at least one contents server for transmitting various media traffics to the base stations. A plasma having an ion density of at least 1011 ionscm3 is formed from the process gas. The system directs the buyer’s RFP to the selected vendors for review and consideration.