An improved system for slaking of lime which does not rely on the weighing of materials delivered to the vessel where the mixing takes place. According to the file folding technique, the \u201cold\u201d data blocks are being overwritten with \u201cnew\u201d data and that new data is identical to the data of the \u201cold\u201d data, no write operation occurs. The cooling passage is arranged closer to the shaping surface than the inlet and the outlet. The bias circuit is used for determining the first, second, third and fourth control signal. The photoresist pattern is removed by plasma ash and then an alloy process is performed to the bottom electrode material layer.