A liquid crystal display device is disclosed. In the method, an access switch receives a Layer 3 packet carrying a VNID from a VM in a remote Data Center. The method is implemented by the FC. The first sub-oxide layer has a first thickness that is uniform along the side and bottom surfaces of the first sub-trench and the second sub-oxide layer has a second thickness greater than the first thickness along the side surface of the second sub-trench. The lithographic apparatus also includes a projection system configured to project the patterned beam onto a target portion of the substrate, and a liquid supply system.