A spatial splitting-based optical Micro Electro-Mechanical Systems Interferometer includes a spatial splitter for spatially splitting an input beam into two interferometer beams and a spatial combiner for spatially combining the two interferometer beams. The workloads include a scheduling key, which is one basis on which the groupings can be formed. On the other hand, the memory transistor has a gate electrode provided on the semiconductor substrate and sourcedrain diffusion layers formed in the semiconductor substrate each having a silicide film formed thereon to be thinner than the silicide film formed on each of the sourcedrain diffusion layers of the logic transistor.