Techniques are disclosed relating to detecting a voltage change. 75 is satisfied where Young’s modulus of the rotor magnet is E1 GPa, and Young’s modulus of the support portion is E2 GPa. A process for fabricating such devices can include forming the conductive film using a vapor deposition process with a reaction gas comprising fluorine. A thermal storage member is interposed between the plate member and the trace pattern for distributing thermal energy throughout the thermal storage member. The power-source passages, too, are formed independently of other digital circuits.