An integrated back-end integrated circuit manufacturing assembly is disclosed. The proteins are useful antigens for vaccines, immunogenic compositions, andor diagnostics. The polyanhydride microparticles or nanoparticles can be, for example, copolymers of sebacic anhydride and 1,6-bis-hexane anhydride, copolymers of 1,8-bis-3,6-dioxaoctane anhydrides and 1,6-bis-hexane anhydride, or various combinations thereof.