A semiconductor wafer transfer equipment transfers a plurality of semiconductor wafers, held in grooves of carriers in an erected state, to a boat using first and second wafer elevators equipped with a comb-teeth portion and a wafer grip and transfer unit. Furthermore, the invention provides antibodies directed against the allergen and to the use of the polypeptides, polynucleotides andor antibodies in therapy and diagnosis of allergic disorders. During material deposition, a bias is applied across the conductor and the platen to cause deposition of material onto the workpiece surface. The mixture is allowed to cool to room temperature, and an additional amount of iron-containing component is added to the mixture, which is then reheated to reaction temperature, and the process is repeated until the isolated iron-containing nanoparticles obtain the desired size. In another embodiment, the piston is an annular piston, and in another embodiment, the piston is a plurality of smaller pistons disposed in the first retainer. The protective structures prevent damage to the bottom electrodes during subsequent processing.