A semiconductor component comprising a semiconductor substrate composed of silicon carbide and comprising separate electrodes applied thereto, said electrodes each comprising at least one monolayer of epitaxial graphene on silicon carbide, in such a way that a current channel is formed between the electrodes through the semiconductor substrate. An apparatus for performing the method is also described in which the polymer tube is placed in a reaction vessel and a temperature controlled fluid is circulated to regulate the temperature in the vessel. In such manner, device pitch is reduced by almost fifty percent. Each saddle member further has an upper bearing surface for receiving at least one cross beam having a lower bearing surface, which bearing surfaces permit movement between a given saddle member and the cross beams it supports. Elements for detachable connection between the button and the control actuator are also provided.