1460424049-8fa31f48-8467-437c-90d4-97431ce8de49

A cleaning end point detecting apparatus detects an end point of a cleaning process in which contamination attached to an inner wall of a reaction chamber is removed by introducing a cleaning gas into the chamber to produce a cluster cloud and detached particles. The first mode is with left and right light units positioned back to back shining in opposite directions defining a closed position. Also included is an extract made using the present inventive methods. The remote computer also includes a software program to be tested.