Immunogenic compositions comprising an immunogenic polypeptide and a pharmaceutically acceptable vehicle are described. The rank of a page for a keyword is a combination of intrinsic and extrinsic ranks. Two blades having an upper surface and a lower surface are provided, with a blade spacer located between the blades, and operably connected to the clamp. The progression of the removal of the damaged layer and the stage of development of a newly damaged layer are sensed by monitoring the change rate of the intensity of reflected probe light in the presence and absence of the exciting light, resulting in the formation of a semiconductor device having low and equal contact resistance.