Provided are a semiconductor device which can be manufactured at low cost and has a low on-resistance and a high withstand voltage, and its manufacturing method. An example of this is data in a spare sector, located in a spare area on the harddisk platter. In some embodiments, operation of the system changes over time. Methods are provided for optimization of fuel efficiency, power, and noise by varying mass flow ratios of the three mass flow streams. Another circuitry is provided to program the sequence of the cleaning process, including washing, rinsing and drying.