The present invention provides a menthol derivative represented by the following Formula 1 and a method for preparing the menthol derivative. The single substrate may be exposed to etch or clean chemistry in the single-substrate processing chamber as turbulence is induced in the etch or clean chemistry to thin the boundary layer of fluid attached to the substrate. The output receptacles include a pass receptacle, a reject receptacle, and at least an additional receptacle for workpieces that are to be re-worked or studied further. One side of the slide block adjacent to the handle is formed with a dented section.