A film of zinc oxide electrochemically deposited from an aqueous solution is subjected to heat treatment at a temperature equal to or higher than 150\xb0 C. In the meantime, a keyword required to specify the file is extracted from the separated data field, and the extracted keyword is converted into a hash value. The ALD process may utilize a first precursor for a first time period, a first purge for a second time period longer than the first time period, a second precursor for a third time period longer than the first time period, and a second purge for a fourth time period longer than the third time period. Panax ginseng, morus alba and Origanum vulgare.