A monitoring device, method and system are disclosed herein. The lamp bulb of the lamp includes at least a first region which is at least partly permeable to infrared light, and at least partly impermeable to visible light. Thus, variations in the density of via contacts, which are one of causes lowering the production yield of semiconductor integrated circuits, is reduced, improving manufacturing defects of the via contacts. Slotted eccentric bushings are inserted into the bolt eyes, which each receive a slotted sleeve and a bolt. The condenser lens is arranged at the laser beam entrance window of the vacuum container, and takes a role of a vacuum bulkhead.