In semiconductor wafer manufacturing, processes such as analyzing test data associated with semiconductor wafers, interpreting the test data analysis, and acting on the test data interpretation and analysis are automated. Thermal vias having one or two flanges are disclosed, as are flush thermal vias. The perfusion parameter calculating unit calculates perfusion parameters corresponding to ROIs based on time variations in density of the contrast medium for the ROIs. If the output voltage level is below the threshold, the driving frames are driven to a reset position and further to a moving center position, and then the power is turned OFF. The third equation is expressed by \u0394n\u2267d, where \u201cd\u201d is a constant specified by a desired half-width value \u03b8para. In use, the solid chemical substance is set around the spraying device, and the jet of water is directed downwards andor laterally so as not to wet the solid chemical substance set above the spraying device.