A NVM device encompasses a MOS select transistor including a select gate electrically connected to a word line, a first source doping region electrically connected to a source line, and a first drain doping region. During the regeneration mode, the elevator motor operates as a generator, and electrical energy is stored in an energy storage system for later use. As a result, problems, such as the activation of an undesired function upon the operation of a switch on a drive unit, and the like, are solved. The resulting 4–2-yl methyl piperidine is alkylated with an alkylating agent in an organic solvent at 20-80\xb0 C. To create a modulated pressure pulse the moveable portion may be for example radially shifted in the flow aperture, rotated in the flow aperture, or the rotation of the moveable portion in the flow aperture may be controlled. The substrate carrier transfer section shifts the position of the substrate carrier between a first position at which the substrate carrier is carried tofrom the outside and a second position at which the substrate in the substrate carrier is delivered tofrom the substrate transfer mechanism.