A method of enabling configuration of a link between a circuit-switched Private Branch Exchange, and an access gateway node that connects at least one CS PBX to an IP Multimedia Subsystem. To achieve the above object, a semiconductor manufacturing apparatus includes: an open-topped cassette that encases a semiconductor substrate; a plurality of processors for performing a predetermined processing of the semiconductor substrate; and a transporting mechanism that transports the cassette encasing the semiconductor substrate between the plurality of processors. The cleaning head has a deck and a skirt extending from the deck such that when the skirt is placed in contact with the surface to be cleaned, a cleaning volume is defined.