A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user’s level of skill are provided. The hernial truss is formed with a front member applied to the abdominal area of the patent, a rear member applied to the back of the patient, left and right waistbands attached to the front member, left and right crotch bands attached to the rear member, and a pressing pad attached to the inside of the front member. The solid oxide fuel cell further includes a first side plate attached to first lateral sides of the individual electric cells for closing up first lateral ends of the channels and a second side plate attached to second lateral sides of the individual electric cells for closing up second lateral ends of the channels. The second integrated circuit die further includes redundancy circuitry responsive to the redundancy information to substitute one or more of the primary storage cells with one or more redundant storage cells. DTU-R measures the line quality while receiving the probe signal. The introducer assembly is designed to easily separate in a smooth tactile manner without disrupting placement of the medical device during removal of the introducer.