A semiconductor apparatus includes a first power supply pad configured to supply a first power; a second power supply pad configured to supply a second power; a first power line configured to be directly electrically coupled to the first power supply pad; and a second power line configured to be directly electrically coupled to the second power supply pad. Because the processing time for each motion vector is fixed, preliminary prediction can be eliminated. The other etchant gas forms a negative plasma, which is the secondary plasma. A first fluid is disposed on the hydrophobic layer and a second fluid is disposed on the first fluid. Also described is the use of the compounds according to the invention as BET protein inhibitors for benign hyperplasias, for atherosclerotic disorders, for sepsis, for autoimmune disorders, for vascular disorders, for viral infections, for neurodegenerative disorders, for inflammatory disorders, for atherosclerotic disorders and for male fertility control.