The invention provides an evaporation system which is one of deposition devices promoting an efficiency of utilizing an EL material and excellent in uniformity and throughput of forming an EL layer and an evaporation method therefor. The non-magnetic layers include cover layers made of low temperature co-fired ceramics. The baseline signal may then be used to normalize the physiological signal. The first mechanically stable support is removed from the ultra-thin glass substrate. The said reference speech elements correspond to a keyword of interest, wherein Simultaneous Orthogonal Matching Pursuit is used in their alignment.