In a method of cleaning a deposition process chamber, a remotely generated activated gas is supplied to the process chamber, in which, depending on the type of excitation means used, a specified chamber pressure in combination with a two-step clean process allows one to significantly reduce nitrogen fluoride consumption and increase throughput. An electronic reference model of the object to be animated is obtained. As the tackifying resin-containing emulsion, a tackifying resin-containing emulsion prepared using substantially no organic solvents or a tackifying resin-containing emulsion prepared using a material other than aromatic hydrocarbon-based organic solvents can be suitably employed. The cyclone separator further having a catching section for receiving the portions of the downhole fluid passing through the isolation plate for gravitational separation into a plurality of phases therein. A fourth step involves melting the snow within the receptacle to convert the snow to water. In this context, the measuring and triggering device is designed to register at least one vibration parameter and to release the liquid from the holding chamber into the interior on the basis of the measured vibration parameter.